Facilities Facilities overview Cleanrooms CGC Class 1000 Cleanroom CGC Class 100 Cleanroom EE Class 100 EE Class 1000 EE Class 10000 Chemistry Lab SEM Lab Electronics Lab Ink Lab Energy Storage Lab Dry Room AFM Lab PLE Lab Photonics Lab Raman Lab Sonication Lab Royce Labs User Manual - RIE-AV user-manual-rie-av.pdf (141.24 KB)