Below, you can find the list of equipment available in Class 100 Cleanroom. A few are already available for use, others are being installed and will become available later.
Please use the booking system to use the equipment.
Electron-Beam Lithography (Royce EBL Suite) Model: EBPG 5200, Raith GMBH A state-of-the-art high-resolution/throughput Electron-Beam Lithography system capable of exposing 8-inch waters. Users in charge: |
Laser WriterPrincipal User: Dr Osman Balci Deputy User: Ms Hamideh Ramezani Model: LW-405B+, Microtech Srl Used for the direct-write contactless optical lithography. Available wavelengths: 385 and 405nm. Best resolution (linewidth) is 0.6micron.
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NanoimprinterPrincipal User: Dr Adil Meersha Deputy User: Dr Ozan Aktas Model: Obducat Eitre 6 with UV curing option. The tool is used for high resolution nanoimprinting.
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Resist Preparation wetbenchThe wetbench is equipped with three spinners and four precision hotplates from EMS.
Processes available: - SU-8 negative photo-resists - AZ/LOR positive and negative photo-resists - PMMA/ZEP e-beam resists |
Development and Cleaning wetbenchThis wetbench is used for preparation of samples for lithography, as well post-processing (development, etc.)
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HF Acid bench |
Triple FurnacePrincipal User: Dr Sachin Shinde Deputy User: Dr Osman Balci The tool is used for deep oxidation of Si Users in charge: |
