Our Cleanrooms of Class 100 and 1000 are connected internally by a clean lift.
Class 100 is the area for high-grade lithography work, with resist preparation and development wetbenches, inspection microscope, nanoimprinter, laser writer, and EBL Raith EBPG5200.
Class 1000 is for wet and dry processing, as well as for the production of graphene and other 2D materials, with a wide range of equipment for physical and chemical vapour deposition, growth and reactive-ion etching. There area also chemical wetbenches for sample preparation/processing, inspection microscopes, transfer systems and an Argon-filled glovebox for sensitive materials with a dedicated robotic transfer system and a thermal evaporator.
To gain access to the Cleanrooms please contact CGC Facilities Manager facilities@graphene.cam.ac.uk
Any equipment will require booking before use, and the booking system can be found here.